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Noticias y actualidad de miCos Iberia S.L.

Active Shims for Nanometer Resolution and Long-Term Stability: Adjusting with Piezo-Based "Shims"

If a target or an actual dimension between two components inside precision machines changes, for instance in semiconductor manufacturing, measuring applications or inspection systems, readjustment may be necessary. An example of this would be when the machine is started up at the user's location, and initial settings, drifting or changes in tolerances need to be compensated after installation. The disadvantage of classical shims that are ground exactly to the required dimension, is that they need to be inserted mechanically. Furthermore, unlimited fine adjustment is not always possible and once the dimension has been fixed, it is often very difficult to change it afterwards. PI (Physik Instrumente) has found the perfect solution for this and developed the PIRest piezo-based "shims". Once they have been installed into the machine, the active shims not only make it possible to readjust the gap between two components at any time, but also achieve this with nanometer precision.

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Silicon Photonics

Simultaneous Testing of Optical Components

In a demonstration setup, PI (Physik Instrumente) shows how fast and precise XYZ stages are able to achieve parallel fiber alignment on the input and output side.

Silicon photonics creates new challenges both for the production of components as well as testing them prior to wafer dicing. Although the test procedure is essentially the same as the familiar electrical process, it is nevertheless more sophisticated for optical components as far as precision is concerned.

The components for processing and transmitting optical signals have one or more inputs and outputs. The packaging or testing process requires an optical fiber to be adjusted with an accuracy of only a few tenths of a nanometer for each individual input and output. If the so-called alignment process is sequential, it quickly becomes uneconomical due to the time factor. As a result, a solution is required for a simultaneous alignment process on the input and output side that shortens the test duration of the components.

Compact Multiaxis Piezo Systems for Nanopositioning and Fast Fiber Alignment

In a demonstration setup, a waveguide integrated in the wafer is simulated by a single-mode fiber. Fibers with lenses are coupled at the fiber ends via precision piezo-based XYZ stages. The positioning systems have a fast scanning velocity and are able to perform alignment in several degrees of freedom – simultaneously at the input and output.

The travel ranges along the X, Y and Z axis are 25 mm for initial alignment of the fibers and 100 µm for the position-controlled scan. The modular E-712 motion controller platform with integrated alignment routines serves as controller, which was specially adapted for this task and can control six motorized and six piezo actuator axes.


Sensor incremental PIOne

Para sistemas de nanoposicionamiento convencional con piezo actuadores y recorridos menores a 1mm, los sensores capacitivos con resoluciones sub nanométricas alcanzan gran estabilidad y linealidad. Pero, para desplazamientos mayores a 1 mm, los sensores capacitivos no son suficientemente precisos....

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PI ha desarrollado un nuevo sistema de posicionamiento electromagnético.

Para la realización de este novedoso sistema han colaborado PI, el IMMS (Instituto de Microelectrónica y sistemas Mecatrónicos) y el departamento de ingeniería mecatrónica de la Universidad Tecnológica de Ilmenau. El resultado de estas cooperaciones es un sistema basado en levitación....

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